Thermal MEMS sensors for aeronautics : from cleanroom to flight tests
This presentation will talk about the work realized at IEMN about the MEMS (micro-electromechanical systems) devices developed for aerodynamic experimentations. The talk will first present the various activities the IEMN and the ONERA carried out jointly. Then, it will focus on the developments realized on the thermal MEMS sensors for wall shear stress measurements, from the first prototypes tested in a cleanroom to the devices that passed flight testing. For about a dozen years, AIMAN FILMS team at IEMN worked on the technological development and packaging of these microsensors in order to bring them from a cleanroom environment to wind tunnel experimentations (flat plate or models) and real flight testing on microlight aircraft.
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